Basic knowledge of air shower room and transfer window in clean room Basic knowledge of air shower room and transfer window in clean room

Update:19 Sep 2022

1. Dust-free clean room air shower room and transfer wi […]

1. Dust-free clean room air shower room and transfer window refers to the particles in the air within a certain space, the air shower room and the transfer window can remove the bacterial pollutants in the dust-free clean room, and the indoor temperature, The cleanliness, indoor pressure, airflow speed and airflow distribution, noise and vibration, lighting, and static electricity are controlled within a certain range of requirements, and the specially designed dust-free clean room is built.

Second, the principle of air shower room and transfer window in clean room. The air shower and the transfer window of the clean room are equipped with HEPA and air purification equipment, and the dust collection rate is as high as 99.97~99.99995%, so the air filtered by this filter can be said to be very clean. However, in the clean room, in addition to the air shower room and the transfer window, there are also high-efficiency filters and high-efficiency air outlets. In addition to people, there are dust sources such as machines in the clean room. Once the dust spreads, it is impossible to maintain a clean space. The generated dust is quickly discharged to the outside by air flow.

3. Three dusts in the air shower room and the transfer window of the dust-free clean room. There are three principles for a clean room: no dust, dust, and dust. As one of the buffer passages into the clean room, the air shower is one of the better purification equipment for controlling dust, which can minimize the pollution caused by employees entering and leaving the clean room. The two doors of the air shower are electronically interlocked, which can also function as an air lock, preventing external pollution and unpurified air from entering the dust-free and clean area, so as to achieve the clean production environment required by the production workshop.

Fourth, the main function of the air shower room and the transfer window of the clean room is to control the cleanliness and temperature and humidity of the atmosphere in contact with the product (such as silicon chips, etc.), so that the product can be produced and manufactured in a good environmental space. We call this space a clean room. By convention, the dust-free purification level is mainly specified according to the number of particles per cubic meter of air whose diameter is greater than the division, so the air shower and the transfer window reach the standard. That is to say, the air shower room and transfer window used in the so-called clean room are not 100% free of dust, but also need to add FFU filter unit and high-efficiency air outlet, but control it in a very small unit. Of course, the dust particles that meet the dust standard in the air shower room and transfer window are very small compared to our common dust, but for the optical structure, even a little dust will have a very large negative impact, so in the In the production of optical structural products, dust-free is an inevitable requirement.

Fifth, the air shower room and the transfer window control the number of particles with a particle size of less than 0.5 microns to less than 3,500 per cubic meter of the clean room, which reaches the A-level of the dust-free standard. The dust-free standards currently used in chip-level production and processing have higher requirements for dust than Class A, and such high standards are mainly used in the production of some higher-level chips. The number of fine dust is strictly controlled within 1000 per cubic meter, which is commonly known as the 1K level in the industry.

Basic knowledge of clean room air shower and transfer window:

The flow of people into and out of the clean area must be carried out according to the following procedures and requirements.

People enter-------change shoes-----take off coat------wash hands------wear clean clothes-------hand disinfection------- Air shower room; clean area ------ go out the door ------ take off the clean clothes ------ put on a coat ---- change shoes ------ people put out disinfectant The preparation is managed by the person in charge, and 0.3? disinfectant is used for disinfection.

Logistics entering the clean area must follow the following procedures and requirements:

Items-----outer packaging room-----air shower transfer window------clean area-------double-layer flow transfer window------entering the packaged goods shower room The parts and raw and auxiliary materials in the clean area must be unpacked and passed through the double-layer transfer window. The produced products need to be packaged and sealed and flow out from the transfer window; after get off work every day, the operator should clean the work surface, floor, and stool. , clean the walls and ceiling once a week, and fill in the "clean workshop hygiene record".